Nanotech 2005 Vol. 2
Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2

Nano Devices and Systems Chapter 4

RuO2 and Ru Nanoparticles for MISiC-FET Gas Sensors

Authors: A. Salomonsson, S. Roy, C. Aulin, L. Ojamäe, P.-O. Käll, M. Strand, M. Sanati, A. Lloyd Spetz

Affilation: IFM, Sweden

Pages: 269 - 272

Keywords: RuO2, Ru, SiC-FET, C(V) catalytically active nanoparticles

Catalytically active nanoparticles used as gate material on SiC-FET gas sensors. The goal is to improve the selsectivity and senstitivty.The sensors are sensitive towards oxidising and reducing gases (H2, NH3, C3H6).

ISBN: 0-9767985-1-4
Pages: 808
Hardcopy: $109.95