Authors: A. Salomonsson, S. Roy, C. Aulin, L. Ojamäe, P.-O. Käll, M. Strand, M. Sanati, A. Lloyd Spetz
Affilation: IFM, Sweden
Pages: 269 - 272
Keywords: RuO2, Ru, SiC-FET, C(V) catalytically active nanoparticles
Catalytically active nanoparticles used as gate material on SiC-FET gas sensors. The goal is to improve the selsectivity and senstitivty.The sensors are sensitive towards oxidising and reducing gases (H2, NH3, C3H6).
Nanotech Conference Proceedings are now published in the TechConnect Briefs