Authors: S.-H. Lee, T.-Y. Kim, S.-C. Lee, Y.-C. Chung, D.W. Brenner and K.-R. Lee
Affilation: Korea Institute of Science and Technology, Korea
Pages: 218 - 221
Keywords: ta-C films, molecular dynamics simulation, Brenner potential
We investigated the structural properties of ta-C film as a function of the dispersion in the incident kinetic energy. The ta-C films were produced on a diamond (100) surface by the bombardment of 3, 000 carbon neutrals with kinetic energy 75 eV. Incident beam energy is dispersed with the standard deviation (¥ò) of Gaussian distribution from 0 to 10. The structural properties such as density and sp3 bond fraction did not show any significant change as the standard deviation varied. However, the residual stress decreased with dispersion of incident beam energy and exhibited a minimum when the standard deviation (¥ò) was 3. In order to reveal the reason for the stress reduction, the radial distribution function (RDF) of these films were investigated. The intensity of the satellite peak at 2.1 Å near the second nearest neighbors showed the same tendency with stress behavior of ta-C film. The present simulation result shows that the residual stress can be reduced by controlling the number of atoms in the meta-stable state which is provided by the energy dispersion of the incident carbon atom.