Authors: D. Routkevitch
Affilation: Synkera Technologies, United States
Pages: 730 - 732
Keywords: anodic alumuna, nanofabrication, ceramic MEMS
Synkera's product development efforts are based on nano- and microstructured materials and advanced methods for their integration into functional devices (www.synkera.com). We offer two main product groups. The first is a broad group of chemical sensor products, which are bridging the gap between the low cost of traditional solid-state sensors and the performance of liquid electrolyte electrochemical sensors. The second group of products, which will be reviewed in this talk, originates from a unique nano/microfabrication technology platform, which affords multiscale engineering of advanced materials and their device integration. At the core of this platform is the synergy of two capabilities, templated nanofabrication and micromachining, both based on nanostructured anodic aluminum oxide (AAO). Controllable nanoscale morphology, micromachinability, chemical and mechanical properties of this material also enable multiple opportunities for product development. This technology platform was successfully used at Synkera to develop and produce a number of products. Unique features and performance of these products are derived from nanoscale engineering of desired materials’ properties and architecture. On the other hand, flexible Ceramic MEMS processing provides a convenient route for integrating these materials into practical devices, such as gas microsensors, gas separation membranes, advanced materials for energy conversion, ceramic MEMS for hardsh environment and bioengineering.