Authors: Q. Tang, S.Q. Shi, L.M. Zhou and C.H. Xu
Affilation: The Hong Kong Polytechnic University, China
Pages: 711 - 714
Keywords: dip-pen nanolithography, gold thin film, gold ball, atomic force microscopy, P(VDF-TrFE)
An AFM-based nanolithography, dip-pen nanolithography is becoming a promising nanotechnology since its invention.However, there exists much uncertaintied in DPN process.Much research work are required to do in order to make it as a competitive nanolithography .In this work, we studied the surface morphology on the transfer rate of a ferroelectric polymer via dip-pen nanolithography, and found surface roughness play important role during dip-pen nanolithography process.
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