Nanotech 2005 Vol. 2
Nanotech 2005 Vol. 2
Technical Proceedings of the 2005 NSTI Nanotechnology Conference and Trade Show, Volume 2

Characterization Tools and Microscopy Chapter 11

Integrated Optical Profiler and AFM: a 3D Metrology System for Nanotechnology

Authors: M. Jobin, A. Du and R. Foschia

Affilation: University of Applied Sciences, Switzerland

Pages: 695 - 697

Keywords: atomic force microscopy, interferance microscopy, nanoscale metrology

A versatile 3D metrology tool for nanotechnology purpose has been built. It consist of an home-made white-light interferance microscope operating in the vertical scanning mode, integrated into a commercial Atomic Force Microscope. The performance in terms of acuracy, speed and noise level of the instruments will be presented as well as one illustrative application in MEMS industry.

ISBN: 0-9767985-1-4
Pages: 808
Hardcopy: $109.95