Authors: N. Modi and F. Lacy
Affilation: Southern University and A&M College, United States
Pages: 501 - 504
Keywords: piezoelectric, microcantilevers, detection of cells
This research project explores the employment of piezoelectric material as the sensing element in microcantilever beams fabricated to function as resonant mass sensors. The cantilever beam would be a very thin double-bridged structure (50 nm) enclosed in a 400 x 400 µm area containing a long piezoresistor of fixed width (5 micron for example), and suspended above an empty cavity as shown in figure 2. Based on results from other researchers1, it is assumed that such structures when made of metal or polysilicon are sensitive enough to detect single cells. The project will investigate the sensitivity of piezoelectric micro-cantilever beams by characterizing the voltage induced by the applied stress on these microstructures. Testing with a constant voltage (offset to a few nanovolts), a sinusoidal voltage, and/or a pulsed form of input voltage will be performed. In addition to this, the frequency response for various lengths and widths of the beams will also be determined. It is therefore expected that such a device will be able to accurately and quantitatively detect immobilized species.