Nanotech 2004 Vol. 3
Nanotech 2004 Vol. 3
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 3

Surfaces and Films Chapter 7

Improved Reproducibility in Porous Silica Sol-Gel Processing Using Tertiary Butanol Solvent

Authors: A.K. Rissanen, M. Blomberg and H. Kattelus

Affilation: VTT Technical Research Centre of Finland, Finland

Pages: 366 - 369

Keywords: sol-gel, aerogel, xerogel, TBA, porous film patterning

Silica aerogels and xerogels are porous materials, which possess many exceptional properties. The research for the use of aerogel thin films in MEMS applications, such as humidity sensors, biosensors and calorimetric devices, is still at an early stage. Therefore the aerogel thin film process development is prerequisite. Previously, highly volatile liquids like ethanol or isopropanol (IPA) have been used for the solvent in the traditional two-step acid-base sol-gel process, which may deteriorate the reproducibility of the process. In this paper, a novel method to produce porous films with improved reproducibility is presented. It is also demonstrated that aerogel films act as a source for particles during the supercritical drying process. Aerogel patterning with lithography and plasma etching is investigated.

ISBN: 0-9728422-9-2
Pages: 561
Hardcopy: $79.95

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