Nanotech 2004 Vol. 3
Nanotech 2004 Vol. 3
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 3

Carbon Nano Structures and Devices Chapter 5

Carbon Nanotube-based Sensor Devices for IC Performance Evaluation

Authors: R.G. Wright, L.V. Kirkland, M. Zgol, D. Adebimpe and R. Mulligan

Affilation: GMA Industries, Inc., United States

Pages: 244 - 247

Keywords: test equipment, carbon nanotubes, electromigration, nanoscale sensors

A novel approach to the problem of identification of failed integrated circuits (ICs) on electronic circuit boards has been sought that would allow for drastically reducing the costs of the test equipment development and maintenance. This article describes our ongoing efforts toward developing the original concept of Molecular Test Equipment (MTE). Here, we will focus on our progress in creating carbon nanotube-based sensors carrying out the integrated circuit performance monitoring functions in an IC substrate level as well as on the problem of interfacing the molecular devices with the existing metallic circuitry of the ICs. The two main areas of interest explored recently by our team in order to create the basis for such sensor fabrication were: (i) producing solutions of homogenously dispersed carbon nanotubes in organic solvents, and (ii) developing a method for controlling the process of nanotube deposition at specific location on the silicon substrate. Using these carbon nanotube manipulation procedures we have fabricated and tested nanotube-based sensors for detecting electromigration phenomenon within the integrated circuits. Experimental results associated with the metal migration sensor development are presented in the paper, and the process of interfacing the sensor with the remaining elements of the MTE is being discussed.

ISBN: 0-9728422-9-2
Pages: 561
Hardcopy: $79.95

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