Nanotech 2004 Vol. 3
Nanotech 2004 Vol. 3
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 3

Nano Devices and Systems Chapter 4

A Nanoscale Electromechanical Contact Switch for Logic Applications

Authors: C.C. Huang and K.L. Ekinci

Affilation: Boston University, United States

Pages: 187 - 189

Keywords: nano-electro-mechanical systems, nano-electro-mechanical switch, mechanical logic

Here, we describe the operation of a nano-electro-mechanical contact switch. The switch design relies on a sharp contact tip integrated to a compliant nanomechanical beam. When the beam is actuated electrostatically, the tip establishes intimate electrical contact between two electrodes. A preliminary contact switch was fabricated on a Si3N4 membrane using optical lithography, electron beam lithography and reactive ion etching. Its quasi-static operation was subsequently demonstrated.

ISBN: 0-9728422-9-2
Pages: 561
Hardcopy: $79.95

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