Nanotech 2004 Vol. 3
Nanotech 2004 Vol. 3
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 3

Commercial Tools, Processes and Materials Chapter 11

Leveraging Mainstream Design and Analysis Tools for MEMS

Authors: I. Mirman and D.C. Flanders

Affilation: SolidWorks Corporation, United States

Pages: 514 - 517

Keywords: MEMS-based products, computer-aided design (CAD), computer-aided engineering (CAE), finite element analysis (FEA), rapid prototyping

After several decades spent largely in the research domain, MEMS-based products are finally being commercialized at a furious pace. These products can require extensive mechanical design and analysis capabilities, including: -3D construction and visualization; -material properties databases; -simulation tools for (potentially coupled) thermal, mechanical, electro-magnetic and fluid analyses; -manufacturing process simulation, including lithographic and etch processes, process tolerances; -mask layout; and -design verification. This technical paper will identify some of the considerations in choosing a MEMS CAD/CAE tool. It will also demonstrate to MEMS product designers how to: -design, create, and control sub-micron-size features; -generate associative semiconductor photomasks; -handle assemblies with thousands of parts; and -perform “what-if” thermo-mechanical, electrostatic and fluid flow behavior analysis to shorten design cycles.

ISBN: 0-9728422-9-2
Pages: 561
Hardcopy: $79.95

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