Authors: W-Y Wu and J-M Ting
Affilation: National Cheng Kung University, Taiwan
Pages: 448 - 451
Keywords: self-assembling, layered structures, diamond-like carbon, thin films, sputter deposition
This paper reports the use of a conventional sputter deposition technique to produce self-assembled alternating nano-scaled layers consisting of diamond-like carbon (DLC) and metal. A conventional sputter deposition technique produces alternating layers only when multiple sputtering targets are employed. However, we have successfully demonstrated that the use of only one single sputtering gun in a conventional sputter deposition process could lead to the formation of alternating nano-scaled layers through self-assembling. The microstructure of the alternating layers was examined as a function of the deposition parameters.
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