Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2

MEMS Modeling Chapter 6

Computational Prototyping of an RF MEMS Switch using Chatoyant

Authors: M. Bails, J.A. Martinez, S.P. Levitan, I. Avdeev, M. Lovell and D.M. Chiarulli

Affilation: University of Pittsburgh, United States

Pages: 355 - 358

Keywords: MEMS, Modeling, Microsystem, FEM, RF Switch, Circuit Simulation

In this paper we demonstrate the capabilities of our system-level CAD tool, Chatoyant, to model and simulate an RF MEMS switch. Chatoyant is a mixed signal, multi-domain CAD tool that can be used to design and analyze complete mixed-technology micro-systems. We perform a system level simulation of an RF MEMS switch. This is accomplished by coupling mechanical and electrical domains of this system. We verify our mechanical results using the commercial simulation packages, ANSYS, and CoventorWare.

ISBN: 0-9728422-8-4
Pages: 519
Hardcopy: $79.95

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