Lee S., Wang X., Shin W., Xiao Z., Chin K.K., Farmer K.R.
Microelectronics Research Center, New Jersey Institute of Technology, US
Keywords: Coriolis mass flow sensor, Resonant beam, resonant frequency shift
This paper presents a simulation of a bridge-type resonating beam connected to the tube loop structure of a Coriolis true mass flow sensor[1]. The resonant beam technique, which is comparable to optical[2], piezoresistive[3], and capacitive[4] detection methods, is used to detect the vertical amplitude change of the tube-loop structure according to the Coriolis force of true mass flow by measuring the frequency shift of the resonating beam. The focus of this paper will be on the frequency shift caused by the amplitude of the bending mode of vibration, and the electrostatic pull-in effect as a measurement method for the frequency shift.
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2
Published: March 7, 2004
Pages: 351 - 354
Industry sector: Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-8-4