Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2

MEMS Modeling Chapter 6

Guidelines of Creating Krylov-subspace Macromodels for Lateral Viscous Damping Effects

Authors: P-C Yen and Y-J Yang

Affilation: National Taiwan University, Taiwan

Pages: 307 - 310

Keywords: macromodels,3-D lateral viscous damping,time-domain

It is well known that modeling 3-D lateral viscous damping effects requires considerable computational resources. Therefore, earlier works on lateral viscous damping were based on the 1-D analytical Stokes and Couette flow solutions [1,2]. Recently, Aluru and Wang [3,4] developed 3-D Stokes solvers using boundary-element method (BEM), and demonstrated that the BEM approaches not only require much less computational cost than typical FEM/FDM approaches, but also significantly reduce the works on creating solid models. However, the solutions of the BEM approaches are in frequency domain, and thus are not completely compatible with transient analysis. In this work, we develop model-order-reduction (MOR) methodology [5,6,7,8] for generating accurate time-domain macromodels from 3-D FDM/FEM Stokes solvers, and explore the characteristics of the macromodels under various conditions.

ISBN: 0-9728422-8-4
Pages: 519
Hardcopy: $79.95

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