Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2

MEMS Modeling Chapter 6

Piecewise Perturbation Method (PPM) Simulation of Electrostatically Actuated Beam with Uncertain Stiffness

Authors: J. Juillard, H. Baili and E. Colinet

Affilation: SUPELEC, Department of Measurement, France

Pages: 283 - 286

Keywords: uncertainties, simulation, perturbation

We present a new approach to the simulation of uncertainties in micro-electromechanical systems, based on the same principle as perturbation methods. This approach is valid for large variations of the uncertainties and requires much less simulations than a Monte-Carlo method. An implementation in the case of an electrostatically actuated beam with uncertain stiffness is presented and compared with obtained with Monte-Carlo.

ISBN: 0-9728422-8-4
Pages: 519
Hardcopy: $79.95

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