Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2

MEMS Modeling Chapter 6

Finite Element Validation of an Inverse Approach to the Design of an Electrostatic Actuator

Authors: J. Juillard, M. Cristescu and S. Guessab

Affilation: SUPELEC, Department of Measurement, France

Pages: 275 - 278

Keywords: MEMS design, optimization, coupled-field problems

We present an approach to the design of electrostatically-actuated micro-structures and discuss its implementation in a software tool called IDEA. The main advantage of this approach is that it considerably reduces problems associated to coupling and to large-displacement non-linearities. The results obtained with IDEA are then compared with ANSYS simulations of an electrostatic micro-mirror.

ISBN: 0-9728422-8-4
Pages: 519
Hardcopy: $79.95

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