Authors: J. Juillard, M. Cristescu and S. Guessab
Affilation: SUPELEC, Department of Measurement, France
Pages: 275 - 278
Keywords: MEMS design, optimization, coupled-field problems
We present an approach to the design of electrostatically-actuated micro-structures and discuss its implementation in a software tool called IDEA. The main advantage of this approach is that it considerably reduces problems associated to coupling and to large-displacement non-linearities. The results obtained with IDEA are then compared with ANSYS simulations of an electrostatic micro-mirror.