Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2

MEMS Modeling Chapter 6

Dynamic Simulation of an Electrostatically Actuated Impact Microactuator

Authors: X. Zhao, H. Dankowicz, C.K. Reddy and A.H. Nayfeh

Affilation: Virginia Tech, United States

Pages: 247 - 250

Keywords: microactuators, electrostatic, impact, dynamic simulation

We study the dynamics of an electrostatically driven impact microactuator reported by Mita and associates. The microactuator is modeled as a two-degree-of-freedom rigid multibody system. The impact phenomenon is described by a simple impact law based on Newton’s coefficient of restitution. The system dynamics is intensively studied. We investigate the influence of various parameters including excitation frequency and voltage.

ISBN: 0-9728422-8-4
Pages: 519
Hardcopy: $79.95