Authors: X. Zhao, H. Dankowicz, C.K. Reddy and A.H. Nayfeh
Affilation: Virginia Tech, United States
Pages: 247 - 250
Keywords: microactuators, electrostatic, impact, dynamic simulation
We study the dynamics of an electrostatically driven impact microactuator reported by Mita and associates. The microactuator is modeled as a two-degree-of-freedom rigid multibody system. The impact phenomenon is described by a simple impact law based on Newton’s coefficient of restitution. The system dynamics is intensively studied. We investigate the influence of various parameters including excitation frequency and voltage.