Authors: X. Zhao, H. Dankowicz, C.K. Reddy and A.H. Nayfeh
Affilation: Virginia Tech, United States
Pages: 247 - 250
Keywords: microactuators, electrostatic, impact, dynamic simulation
We study the dynamics of an electrostatically driven impact microactuator reported by Mita and associates. The microactuator is modeled as a two-degree-of-freedom rigid multibody system. The impact phenomenon is described by a simple impact law based on Newton’s coefficient of restitution. The system dynamics is intensively studied. We investigate the influence of various parameters including excitation frequency and voltage.
Nanotech Conference Proceedings are now published in the TechConnect Briefs