Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2

MEMS Modeling Chapter 6

Compact Models for Squeeze-Film Damping in the Slip Flow Regime

Authors: R. Sattler and G. Wachutka

Affilation: Technical Univeristy of Münich, Germany

Pages: 243 - 246

Keywords: squeeze-film damping, mixed-level modeling, compact model, slip flow, finite network

We propose a mixed-level simulation scheme for squeeze film damping effects in microdevices, which makes it possible to include damping effects in system-level models of entire microsystems in a natural, physically-based and flexible way. Our approach allows also for complex geometries, large deflection and coupling to other energy domains. In this work, we focus on the extension of our model to the slip flow regime. To this end, the flow problem is separated into appropriate blocks. For each block the slip factor is derived analytically or extracted from FEM simulations based on the Navier-Stokes equation with slip boundary conditions. Our fully parametrized and, therefore, predictive mixed-level model could be verified by FEM and experimental analysis.

ISBN: 0-9728422-8-4
Pages: 519
Hardcopy: $79.95