Nanotech 2004 Vol. 2
Nanotech 2004 Vol. 2
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 2

Compact Modeling Chapter 3

A Trial Report: HiSIM-1.2 Parameter Extraction for 90 nm Technology

Authors: Y. Iino

Affilation: Silvaco Japan, Japan

Pages: 147 - 150

Keywords: HiSIM, surface potential, parameter extraction, compact model

This paper reports HiSIM-1.2 Spice model parameter extraction for a practical 90 nm technology devices. The extraction sequence with the measurement data will be exhibitted. The number of optimized HiSIM parameters were only 19 out of 89. And the result verified the HiSIM-1.2 model scalability down to 100 nm with several improvement points.

ISBN: 0-9728422-8-4
Pages: 519
Hardcopy: $79.95

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