Nanotech 2004 Vol. 1
Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1

MEMS Design and Application Chapter 8

Device Characterization at the Wafer Level via Optical Actuation and Detection

Authors: J. Hedley, J.S. Burdess, A.J. Harris and B.J. Gallacher

Affilation: Newcastle University, United Kingdom

Pages: 394 - 397

Keywords: optical, actuation, MEMS, characterization

This paper investigates the technique of optical actuation of MEMS. It is shown that a device can be driven into all of its vibrational modes simply and non-destructively by a laser pulse, making this an ideal actuation methodology for device characterization at the wafer level. This actuation method is shown to be comparable to a mechanical impulse actuation.

ISBN: 0-9728422-7-6
Pages: 521
Hardcopy: $79.95

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