Nanotech 2004 Vol. 1
Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1

MEMS Design and Application Chapter 8

A Novel Fabrication Technique of Cylindrical Ion Traps using Low Temperature Co-fired Ceramic Tapes

Authors: A. Chaudhary, F.H.W. van Amerom, S. Bhansali and R.T. Short

Affilation: University of South Florida, United States

Pages: 371 - 373

Keywords: cylindrical ion trap, miniaturization, green tapes

This work concentrates on a novel technique for the fabrication of miniaturized cylindrical ion trap structures (CIT) to be used as replacements of commercial hyperbolic structure ion trap mass spectrometers. Low temperature co-fired ceramic (LTCC) tapes (Dupont 951), commonly known as green tape, were used to fabricate a CIT structure of 2.75 mm in diameter. The fabrication process included a stainless steel die, which was used to obtain the impressions, for automatic alignment of stainless steel end plates. The ring electrode structure made out of green tape and the stainless steel endplates, were plated with electro-less Ni and electro-less Au to obtain a conducting surface. The green tape CIT structures were tested for background contamination and out-gassing under vacuum in a Saturn 2000 MS Mass Spectrometer. Experiments showed that no considerable out-gassing or contamination is present at pressures of 10-4 to 10-6 Torr. Other techniques to fabricate CIT structure involving green tapes are being explored as an alternative.

ISBN: 0-9728422-7-6
Pages: 521
Hardcopy: $79.95