Nanotech 2004 Vol. 1
Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1

MEMS Design and Application Chapter 8

A MEMS Tunable Inductor

Authors: I. Zine-El-Abidine, M. Okoniewski and J.G. McRory

Affilation: University of Calgary and TRLabs, Canada

Pages: 340 - 342

Keywords: radio frequency, MEMS, inductor, tunable

This paper reports a single-wafer micromachined radiofrequency (RF) inductor that can be integrated in a conventional RFIC device. The inductor achieved a quality factor greater than 9 at 5Ghz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.

ISBN: 0-9728422-7-6
Pages: 521
Hardcopy: $79.95