Nanotech 2004 Vol. 1
Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1

Micro and Nano Structuring and Assembly Chapter 10

Direct Scanning Laser Writing of 3D Multilayer Microstructures

Authors: H. Yu, B. Li and X. Zhang

Affilation: Boston University, United States

Pages: 461 - 464

Keywords: 3D microstructures, scanning laser direct writing

Material processing with lasers is an expanding field since it not only makes manufacturing cheaper, faster, cleaner, and more accurate but also opens up entirely new technologies and manufacturing methods that are simply not available using standard techniques. In this paper, we demonstrate the use of a beam-scanning laser system for the rapid prototyping of 3-D microstructures in a negative photosensitive polymer (SU-8). Furthermore, with the aid of an auxiliary laser alignment setup, this technology could be readily extended to the flexible fabrication of 3-D multilayer microstructures, which promise to be of great importance for the coming biotechnology revolution. Hence it presents an alternative, novel approach to the fabrication of a class of MEMS devices.

ISBN: 0-9728422-7-6
Pages: 521
Hardcopy: $79.95