Authors: H. Yu, B. Li and X. Zhang
Affilation: Boston University, United States
Pages: 461 - 464
Keywords: 3D microstructures, scanning laser direct writing
Material processing with lasers is an expanding field since it not only makes manufacturing cheaper, faster, cleaner, and more accurate but also opens up entirely new technologies and manufacturing methods that are simply not available using standard techniques. In this paper, we demonstrate the use of a beam-scanning laser system for the rapid prototyping of 3-D microstructures in a negative photosensitive polymer (SU-8). Furthermore, with the aid of an auxiliary laser alignment setup, this technology could be readily extended to the flexible fabrication of 3-D multilayer microstructures, which promise to be of great importance for the coming biotechnology revolution. Hence it presents an alternative, novel approach to the fabrication of a class of MEMS devices.