Nanotech 2004 Vol. 1
Nanotech 2004 Vol. 1
Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1

Micro and Nano Structuring and Assembly Chapter 10

Batch Fabrication of Microsensor Arrays by TiO2 Nanoparticle Beam Deposition

Authors: P. Milani, E. Barborini, P. Piseri, S. Iannotta and P. Siciliano

Affilation: Universita' di Milano, Italy

Pages: 459 - 460

Keywords: cluster assembling, microfabrication, nanofabrication, sensor array, combinatorial production

Here we present the production and characterization of chemical microsensors based on nanostructured TiO2 deposited on microfabricated platforms. Aerodinamically filtered supersonic cluster beam deposition allows to control the nanoparticle size and to deposit in batch on microplatform arrays by using stencil masks. Since the material retains the memory of the precursor clusters, it is possible, by thermal annealing, to prepare arrays with elements characterized by different crystalline phase, grain size and porosity. This allows a novel combinatorial approach to the large-scale fabrication of multi-element micro- and nanosensing devices.

ISBN: 0-9728422-7-6
Pages: 521
Hardcopy: $79.95

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