Nanotech 2003 Vol. 2
Nanotech 2003 Vol. 2
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2

MEMS Design and Application Chapter 9

Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical scheme

Authors: O. Bochobza-Degani, D. Elata and Y. Nemirovsky

Affilation: Electrical Engineering Department, Technion, Israel

Pages: 436 - 439

Keywords: charge pull-In, electrostatic actuation, modeling, numerical scheme

This work deals with the stability of charge-controlled electrostatic actuators. First, a general proof is presented showing that for any electrostatic actuator, the stability range under charge-control is always larger than the stability range under voltage-control. Second, a novel numerical scheme for analyzing the stability and extracting the charge Pull-In parameters of charge-controlled actuators is proposed. Third, a novel strategy for further extending the travel-range of charge-controlled actuators is suggested.

ISBN: 0-9728422-1-7
Pages: 600

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