Nanotech 2003 Vol. 2
Nanotech 2003 Vol. 2
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2

MEMS Design and Application Chapter 9

Magnetic Diffusion in Nonlinear Micro-Media: A Modified Finite-Difference Time-Domain Approach
H. Koser, F. Cros, M.G. Allen, J.H. Lang
Massachusetts Institute of Technology, US

Mixed-Level Model for Highly Perforated Torsional Actuators Coupling the Mechanical, the Electrostatic and the Fluidic Domain
R. Sattler, G. Schrag and G. Wachutka
Institute for Physics of Electrotechnology, DE

System Level Simulation of Mixed-signal Multi-domain Microsystems with Piecewise Linear Behavioral Models
J.A. Martínez, T.P. Kurzweg, S.P. Levitan, A.J. Davare, M. Kahrs and D.M. Chiarulli
University of Pittsburgh, US

Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer
H. Xie, G.K. Fedder, Z. Pan and W. Frey
University of Florida, US

Tilt-angle Stabilization of Electrostatically Actuated Micromechanical Mirrors
J.H. Chen, W. Weingar, A. Azarov and R.C. Giles
Agere Systems, US

Very Large Scale Integration of MOEMS Mirrors, MEMS Angular Amplifiers and High-voltage, High-density IC Electronics for Photonic Switching
J. Bryzek, S. Nasiri, A. Flannery, H. Kwon, M. Novack, D. Marx, El Sigari, E. Chen and J. Garate
Transparent Networks, US

Symmetry and Symmetry Breaking in Electrostatically Actuated MEMS
J.A. Pelesko, D.H. Bernstein and J. McCuan
University of Delaware, US

Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical scheme
O. Bochobza-Degani, D. Elata and Y. Nemirovsky
Electrical Engineering Department, Technion, IL

Superharmonic Resonance of an Electrically Actuated Resonant Microsensor
E.M. Abdel-Rahman and A.H. Nayfeh
Virginia Polytechnic Institute and State University, US

Air Damping in an Ultra-High-Frequency Disk Resonator
L.Y. Yap, L.K. Yap and W. Ye
Georgia Institute of Technology, US

Monte Carlo Modeling of Micro-Scale Gas Flows
J. Fan and C. Shen
Chinese Academy of Sciences, CN

Size and Strain Rate Effects in Tensil Deformation of Cu Nanowires
W. Liang and M. Zhou
Georgia Institute of Technology, US

ISBN: 0-9728422-1-7
Pages: 600