Papers:
Magnetic Diffusion in Nonlinear Micro-Media: A Modified Finite-Difference Time-Domain Approach
As flux densities and frequencies are raised to increase the performance of magnetic micro-actuators, micro-motors/generators, and micro-inductors, eddy currents and magnetic saturation start to limit the performance of these devices. In this paper, we present [...]
Mixed-Level Model for Highly Perforated Torsional Actuators Coupling the Mechanical, the Electrostatic and the Fluidic Domain
Electrostatic attraction between neighboring electrodes is a widely used actuation principle employed in tiltable micromirrors or microrelays. Electrostatic actuation is especially favored for switching applications in mobile telecommunication because of its low power consumption. State-of-the-art [...]
System Level Simulation of Mixed-signal Multi-domain Microsystems with Piecewise Linear Behavioral Models
The creation of simulation tools for mixed-signal, multi-domain (MSMD) systems is challenging because these systems span the physical domains of electronics, photonics, fluidics, and mechanics, as well as multiple orders of magnitude in both time [...]
Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer
This paper reports a novel single structure, three-axis sensing accelerometer based on post-CMOS process. The resultant device incorporates both thin-film structures and bulk Si structures to achieve three-axis acceleration sensing without extra front-side lithography, or [...]
Tilt-angle Stabilization of Electrostatically Actuated Micromechanical Mirrors
Recently proposed optical subsystems utilizing micro-electromechanical components are being developed for use in photonic crossconnects, optical add/drop multiplexers, and spectral equalizers. Common elements to these subsystems are electrostatically actuated micromechanical tilt mirrors that steer optical [...]
Very Large Scale Integration of MOEMS Mirrors, MEMS Angular Amplifiers and High-voltage, High-density IC Electronics for Photonic Switching
Bryzek J., Nasiri S., Flannery A., Kwon H., Novack M., Marx D., Sigari El, Chen E., Garate J., Transparent Networks, US
The demand for communication bandwidth together with advances in MEMS (micro-electro-mechanical systems) technology has spurred rapid development in the field of MOEMS (micro-optical-electrical mechanical systems). One exciting opportunity is in the area of photonic switching. [...]
Symmetry and Symmetry Breaking in Electrostatically Actuated MEMS
We investigate the symmetry of solutions to the small aspect ratio approximate model of electrostatic actuation. We find that for an annular shaped domain asymmetric solutions may occur.
Stability of Charge-Controlled Electrostatic Actuators: A general theorem and a novel charge Pull-In extraction numerical scheme
This work deals with the stability of charge-controlled electrostatic actuators. First, a general proof is presented showing that for any electrostatic actuator, the stability range under charge-control is always larger than the stability range under [...]
Superharmonic Resonance of an Electrically Actuated Resonant Microsensor
We investigate the response of a microbeam-based resonant sensor to a superharmonic electric actuation. The model incorporates the nonlinearities associated with moderately large displacements and electric forces. The method of multiple scales is used to [...]
Air Damping in an Ultra-High-Frequency Disk Resonator
In this paper we investigate the air damping in a circular disk radially oscillating at 1GHz. First the compressibility effects of air between the disk and the substrate are studied. The pressure perturbation along the [...]
Monte Carlo Modeling of Micro-Scale Gas Flows
In the past few years, an information preservation (IP) method [1-6] has emerged as a numerical technique to analyze subsonic, micro-scale gas flows. In this method, simulated molecules move through physical space and undergo collisions [...]
Size and Strain Rate Effects in Tensil Deformation of Cu Nanowires
Nanoscale plasticity has drawn significant attention in recent years. Extensive Experimental and numerical studies have been conducted in this field. In previous molecular dynamics (MD) simulations, the Nose-Hoover isothermal procedure was often used to maintain [...]
Journal: TechConnect Briefs
Volume: 2, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2
Published: February 23, 2003
Industry sectors: Advanced Materials & Manufacturing | Sensors, MEMS, Electronics
Topic: MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9728422-1-7