Authors: J. Lee, Y. Kim, D. Na and S. Park
Affilation: Kyungpook National University, Korea
Pages: 388 - 391
Keywords: RF, MEMS, tunable, capacitor, electrostatic
In this paper, we have proposed a fabrication method of a RF-MEMS voltage tunable capacitor using Au-electroplating technique, which has one movable parallel plate with various structure of beams. We applied an electrostatic method and electroplating technique. Electroplating technique is used to fabricate various geometric structures in the surface micromaching technology. In consequence, compared with conventional structures, the theoretical tuning range, Cmax/Cmin, can be widely ranged at the applied bias voltages.
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