Nanotech 2003 Vol. 2
Nanotech 2003 Vol. 2
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2

Computational Methods and Numerics Chapter 12

Study of Misaligned Lateral Combdrive Static Actuators

Authors: I. Avdeev, M. Lovell and D. Onipede Jr.

Affilation: University of Pittsburgh, United States

Pages: 570 - 573

Keywords: combdrive, misalignment, modeling, FEA

In-plane combdrive misalignments are studied using developed analytical and numerical (FEA) models and techniques. Issues of decreasing precision and stability are discussed. The analytical models are closed form and can be used by designers of analog microdevices.

ISBN: 0-9728422-1-7
Pages: 600

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