Authors: Y. Jeong, B. Kim, H. Oh and J-O Park
Affilation: Korea Institute of Science & Technology, Korea
Pages: 496 - 499
Keywords: micro robot, microsystems, MIS, micro pump, locomotion
In this paper, we describe a locomotive inspection robot with integrated microsystems that comprises a micro pump, micro valves, micro channels, a sophisticated pressure amplification system with multi-bellows and biocompatible linear actuators with plastic coated SMA (Shape Memory Alloy) material. This locomotive robot uses a novel locomotive device based on suction-clamping and linear actuation activated by micro-components. The total performance of this locomotive device varies severely with parameter changes of each component because the micro components are very sensitive to other components. We performed a simulation(Matlab/Simulink) to calculate the clamping preparation time with various micro pump powers and to check the operation points of the combined system. The required specifications of the micro-pump, micro-channel and pressure amplifier can be decided based on such kind of simulation. Using system level modeling and analysis software, COVENTWARE SABER, we established the total systems and analyzed the total sequential behavior to evaluate the control concept and to trace the behavior of the system during operation. With this system level analysis, it is possible to tune all parameters for each micro-components precisely. The proposed analysis method can also be used generally in designing other micro-robots or micro-systems that comprise multi-micro-components fabricated with different MEMS processing.