Nanotech 2003 Vol. 2
Nanotech 2003 Vol. 2
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 2

MEMS Modeling Chapter 10

Design & Simulation of a CMOS MEMS using Standard Microelectronic CAD Environment

Authors: L. Latorre, V. Beroulle and P. Nouet

Affilation: LIRMM, France

Pages: 472 - 475

Keywords: CMOS MEMS, ASIC design, SPECTRE-RF, Verilog-A

This paper concerns the design and simulation of a CMOS MEMS-Based Spectrum Analyzer. A Mechanical structure is used for high-Q filtering. Modeling is presented together with associated Verilog-A module. Small signal analysis are then performed using the recently released Spectre-RF simulator.

ISBN: 0-9728422-1-7
Pages: 600