Micro Fluidics Chapter 9

Surface Micromachined Viscous Spiral Pump

Authors: M.I. Kilani, P.G. Galambos, Y. Haik and C.J. Chen

Affilation: Florida State University, United States

Pages: 210 - 213

Keywords: pump, spiral

Abstract:
This paper introduces a new viscous micropump produced using surface micromachining technology. The pump consists of a disk with a spiral protrusion that rotates at a close proximity over a stationary plate. Fluid contained in the spiral channel created by this geometry is subject to a net tangential viscous stress and a positive pressure gradient is established in the direction of flow. The paper describes the design and fluid modeling of the micro spiral pump.

ISBN: 0-9728422-0-9
Pages: 560