Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

MEMS Design and Application Chapter 11

Operation and Testing of a Micro Heat Engine

Authors: S. Whalen, R. Richards, D. Bahr and C. Richards

Affilation: Washington State University, United States

Pages: 404 - 407

Keywords: MEMS power, micro heat engine, piezoelectric power

The development and testing of a micro heat engine is presented. For the first time the production of electrical power by a dynamic micro heat engine is demonstrated. The prototype micro heat engine is an external combustion engine, in which thermal power is converted to mechanical power through the use of a novel thermodynamic cycle. Mechanical power is converted into electrical power through the use of a thin-film piezoelectric membrane generator. This design is well suited to photolithography-based batch fabrication methods, and is unlike any conventionally manufactured macro-scale engine.

ISBN: 0-9728422-0-9
Pages: 560

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