Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

MEMS Design and Application Chapter 11

Modeling the Electro-Thermal Response of Thermally Isolated Micromachined Distributed Structures

Authors: E. Socher, O. Bochobza-Degani, D. Elata and Y. Nemirovsky

Affilation: Israel Institute of Technology, Israel

Pages: 384 - 387

Keywords: electro-thermal modeling, thermal runaway, burn-out, numerical scheme

This work analyzes the electro-thermal behavior of thermally isolated micromachined resistive structures. A novel numerical scheme for solving the coupled electro-thermal problem is suggested. The novel scheme can capture the thermal instabilities under both voltage and current control. The model is compared with experimental data showing good agreement.

ISBN: 0-9728422-0-9
Pages: 560

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