MEMS Design and Application Chapter 11

Development of a Resonant Magnetometer

Authors: Z. Izham, M.C.L. Ward, K.M. Brunson and P.C. Stevens

Affilation: Microsystems Mechanical Engineering, United Kingdom

Pages: 340 - 343

Keywords: resonant mechanical sensor, magenetic sensor

Abstract:
A new design and analysis of a resonant magnetometer is presented. Preliminary analysis shows a sensitivity of 3.9mV/microT. BESOI manufacturing techniques promises easy incorporation to present gyroscope and accelerometer designs promising a complete navigational control chip, which is the motivation to this project. This paper describes the design of a resonance based MEMS magnetometer that is manufactured using the Advanced Surface Etch (ASETM) process developed by Surface Technology Systems (STS) from Bonded etched silicon on insulator BESOI wafers. The design philosophy considers the ease of process, manufacturability, minimum number of steps and mask plates required for the development of the sensor.

ISBN: 0-9728422-0-9
Pages: 560