Authors: X. Zhang, Y. Yao, G. Wang, L. Huang and N. Han
Affilation: Intpax Inc., United States
Pages: 328 - 331
Keywords: mirror, modeling, simulation
Insights are developed for the design of an electrostatic actuated biaxial micro optical mirror. The relation among the pull-in angle, lift space, electrode size and applied voltage are derived and the simplification is achieved. The analytical and FEM simulation results are compared. It is found that with a constant correction coefficient the analytical formula has good match with the FEM simulation. In this way, the analytical guideline may be applied for fast prototype design while the time-consuming FEM only be taken as the design validation. This design methodology is applied to a specific micro mirror design successfully.