Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

MEMS Design and Application Chapter 11

The Design of a Biaxial Micro Mirror

Authors: X. Zhang, Y. Yao, G. Wang, L. Huang and N. Han

Affilation: Intpax Inc., United States

Pages: 328 - 331

Keywords: mirror, modeling, simulation

Insights are developed for the design of an electrostatic actuated biaxial micro optical mirror. The relation among the pull-in angle, lift space, electrode size and applied voltage are derived and the simplification is achieved. The analytical and FEM simulation results are compared. It is found that with a constant correction coefficient the analytical formula has good match with the FEM simulation. In this way, the analytical guideline may be applied for fast prototype design while the time-consuming FEM only be taken as the design validation. This design methodology is applied to a specific micro mirror design successfully.

ISBN: 0-9728422-0-9
Pages: 560

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