Nanotech 2003 Vol. 1
Nanotech 2003 Vol. 1
Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1

MEMS Design and Application Chapter 11

Magnetic Diffusion in Nonlinear Micro-Media: A Modified Finite-Difference Time-Domain Approach

Authors: H. Koser, F. Cros, M.G. Allen, J.H. Lang

Affilation: Massachusetts Institute of Technology, United States

Pages: 280 - 283

Keywords: MEMS, magnetic diffusion, saturation, FDTD

As flux densities and frequencies are raised to increase the performance of magnetic micro-actuators, micro-motors/generators, and micro-inductors, eddy currents and magnetic saturation start to limit the performance of these devices. In this paper, we present a powerful numerical method based on a modified finite-difference time-domain (FDTD) simulation of Maxwell’s equations. This method successfully models both eddy currents and material saturation within a magnetic MEMS device. Experimental verification of the method is also presented.

ISBN: 0-9728422-0-9
Pages: 560

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