Papers:
Using Very Large Arrays of Intelligent Sensors
In 1994 the author patented an intelligent vibration sensor. The device was essentially an accelerometer with integrated analog and digital processing capability as shown in figure 1, which allowed a large proportion of the diagnostic [...]
The Monolithic Integration of 6H-SiC Electronics with 6H-SiC MEMS for Harsh Environment Applications
We report the development of a design and fabrication methodology for the first monolithic integration of silicon carbide (SiC) MEMS sensors with SiC-based electronic amplification and control circuitry. MEMS and circuit integration on silicon has [...]
Microsystem Modeling – from Macromodels to Microsystem Design
The paper presents ideas about possible approaches to development of microsystem models. From the general point of view, microsystem (MST) is considered as a system dealing with non-electrical quantities from all energy domains of real [...]
Microsensors, Arrays and Automatic Diagnosis of Sensor Faults
As man-made dynamical systems become increasingly complex, there is an ever-present need to ensure their safe and reliable operation [1]. These requirements extend beyond the normally accepted safety-critical systems (e.g. nuclear reactors, chemical plants, and [...]
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2003 Nanotechnology Conference and Trade Show, Volume 1
Published: February 23, 2003
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications, Sensors - Chemical, Physical & Bio
ISBN: 0-9728422-0-9