Authors: J. Xu, R.B. Darling and P.O. Lauritzen
Affilation: University of Washington, United States
Pages: 289 - 292
Keywords: bistability, cantilevers, compact modeling, electrostatic actuators, MEMS switches
A compact circuit simulation model for a bistable electrostatic cantilever actuator is presented which is appropriate for circuit and system simulation of RF MEMS switches. This simplified model captures the essential physical features of a cantilever, including hysteresis and bistability, making it suitable for large-signal circuit analyses. The model is extremely compact by means of using only a single internal system variable and requires only a small number of material and geometrical parameters. The model also properly conserves charge while still representing a voltage-variable, bistable capacitance.