MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Equivalent Circuits, Behavioral and Multilevel Simulation Chapter 7

Modeling a Piezoelectric Actuator Using a Transformer Equivalent Circuit

Authors: F. Oms-Elisabelar, C. Bergaud, L. Nicu and A. Martinez

Affilation: CNRS, France

Pages: 249 - 253

Keywords: equivalent circuit, global simulation, piezoelectric actuator, MEMS

In this paper, we describe both the static and dynamic behaviors of an AFM-like piezoelectric actuator using a transformer equivalent circuit in which both the electrical and mechanical portions are represented by electrical equivalencies. The equivalent circuit is develped starting grom electromechanical transduction principles and included in a commercial SPICE package. ANalytical and simulated results are compared and found in good agreement both for static and dynamic analysis.

ISBN: 0-9666135-4-6
Pages: 697