MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Process Modeling Chapter 4

A Program for Modeling of Technological Routes of VLSI Fabrication - ProMIC-T
V. Tesluk and O. Korbetskyy
Lvov Polytechnic, UA

Simulation Support for Silicon-Bulk Microsystems Demonstrated in an Inclination Sensor Development
D. Zielke

Laser Induced Surface Modification of Ceramic Substrates for Thermal and Electric Lines in Microsystems: Modeling Compared to Experiment
H. Gruhn, R. Heidinger, M. Rohde, S. Rüdinger, J. Schneider and K.-H. Zum Gahr
Forschungszentrum Karlsruhe, DE

Nitrous Oxide-Based Progressive Silicon Oxynitridation in Furnaces of Different Dimensions
S.S. Dang and C.G. Takoudis
University of Illinois - Chicago, US

Mask-Layout Synthesis Through an Evolutionary Algorithm
H. Li and E.K. Antonsson
California Institute of Technology, US

Surface Reconstruction of Etched Contours
C.-Y. Lee and E.K. Antonsson
California Institute of Technology, US

A Novel Method to Utilize Existing TCAD Tools to Build Accurate Geometry Required for MEMS Simulation
N.M. Wilson, S. Liang, P.M. Pinsky and R.W. Dutton
Stanford University, US

Design of Compensation Structures for Anisotropic Etching
M.K. Long, J.W. Burdick and E.K. Antonsson
California Institute of Technology, US

ISBN: 0-9666135-4-6
Pages: 697

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