Papers:
Development of CAD Model for MEMS Micropumps
This paper describes development of a Computer Aided Design Model for MicroElectroMechanical Systems. Finite Element Analyses have been completed successfully to understand the physical nature of the sample MEMS devices. Numerical results have been supported [...]
Nanosecond Range Heating and Temperature Measurement on Thin Layers Experiment and Simulation
Moritz W., Roth U., Heyde M., Rademann K., Reichling M., Hartmann J., Humboldt Universitat zu Berlin, DE
A chemical semiconductor sensor for oxygen gas was activated by thermal treatment. The thin Pt layer of the n-Si/SiO2/Si3N4/LaF3/Pt field effect structure was used as the gate electrode for sensitivity measurements, heating resistance and temperature [...]
Modeling of the Piezoelectric Micropump for Imporving the Working Parameters
In this paper a modeling for the flow of viscous liquids and a way to improve the piezoelectric micropump efficiency are described, in order to find the most convenient set of hydraulic parameters. The main [...]
Finite Element Modeling of a Microhotplate for Microfluidic Applications
A hand-held chemical laboratory (mChemLab) is being developed that utilizes a silicon- nitride-supported microhotplate in the front-end, gas sampling and preconcentration stage. Device constraints include low-power (<200mW at 5V), rapid heating (<20msec), and a relatively [...]
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Industry sector: Sensors, MEMS, Electronics
Topics: Micro & Bio Fluidics, Lab-on-Chip, Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6