MSM 99
MSM 99
Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems

Applications: Pressure, Actuation, Navigation Chapter 17

Phenomenological Model for Gas Damping of High-Speed Switches
D.S. Greywall, J.A. Walker, P.A Busch, S.C. Arney, D.J. Bishop, G.D. Boyd, N.J. Frigo, K.W. Goossen, P.P. Iannone, R.R. Ruel and B. Yurke
Bell Laboratories, Lucent Technologies, Inc., US

Simulation of the Production of Functional Layers for Vibration Sensors for Tool State Monitoring and Finite Element Analysis of Mechanical Characteristics
J. Thomas, R. Kühnhold, R. Schnupp, G. Temmel, H. Ryssel
Fraunhofer-Institut fur Integrierte Schaltungen, DE

Oscillating Diaphragms
J. McEntee and L. Bowman
McEntee Engineering, US

Analytical Modelling for Accelerometers with Electrically Tunable Sensitivity
E. Cretu, M. Bartek and R.F. Wolffenbuttel
Delft University of Technology, LN

Modeling and Simulation of Micromachined Gyroscopes in the Presence of Imperfections
A. Shkel, R.T. Howe, R. Horowitz
University of California-Berkeley, US

Simulation and Optimization of Variable Capacitance (VC) Micromotors, Using Modified Parallel-Plate Model
A. Salman, A. Napieralski and G. Jablonski
Technical University of Lodz, PL

Joule Heating Simulation of Poly-Silicon Thermal Micro-Actuators
D.J. Silversmith and J.R. Reid
Air Force Research Laboratory, US

Fluctuating Amplitudes of Micro-Cantilever Vibration Modes
A. Greiner, M. Fischer and J.G. Korvink
Albert Ludwigs Universitat Frieburg, DE

Modeling and Design Optimization of a CMOS Compatible MEMS
L. Latorre, Y. Bertrand, P. Hazard, F. Pressecq and P. Nouet

Simulation of Nonideal Behaviour in Integrated Piezoresistive Silicon Pressure Sensors
W. Romes, J. Muchow, S. Finkbeiner, J. Franz, O. Schatz and H-P. Trah
Robert Bosch GmbH, DE

Analytical Simulation of a 1D Single Crystal Silicon Electrostatic Micromirror
H. Camon, F. Larnaudie, F. Rivoirard and B. Jammes

Analytical Modeling of Cross-Axis Coupling in Micromechanical Springs
S. Iyer, Y. Zhou and T. Mukherjee
Carnegie Mellon University, US

Modeling Approach for CVD-Diamond Based Mechanical Structures
P. Schmid, M. Adamschik, S. Ertl, P. Gluche and E. Kohn
University of Ulm, DE

A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor
W.P. Eaton, F. Bitsie, J.H. Smith, D.W. Plummer
Sandia National Laboratory, US

Modeling of SiC Lateral Resonant Devices Over a Broad Temperature Range
R.G. DeAnna, S. Roy, C.A. Zorman and M. Mehregany
US Army Research Laboratory, US

3-D Finite Element Modeling Schemes for Design and Simulation of VR Microactuator
A. Mohamed and M. El-Hagry
Electronics Research Institute, EG

ISBN: 0-9666135-4-6
Pages: 697