Nakamae K., Ohmori H., Fujioka H.
Osaka University, JP
Keywords: integrated circuit manufacturing, particle-induced yield, simulation, yield predictor
A simple VLSI particle-induced yield predictor has been developed that allows us to predict the entire yield of VLSI and also to analyze the bottleneck processing steps and faults. Particles with spherical shape are generated in the production equipment for each VLSI processing step and are deposited on the wafer. The yield predictor accepts as inputs (a) layout description of the VLSI under analysis in GDS II format, (b) production flow data, (c) planned layer thickness data, and (d) particle parameters for each production equipment. The predictor was applied to 16Mbit DRAM to show its validity.
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 479 - 482
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6