Ramos I., García L., Furlan R., Santiago-Aviles J.J., Pereira M.T.
University of Puerto Rico at Humacao, US
Keywords: fluid mechanics, green tape, jet vapor etching, nozzle, simulation
We applied numerical simulation in order to gain knowledge and insight into the physical processes associated with Jet Vapor Etching, a subtractive process used in the machining of Low Temperature Co-Fired Ceramic (LTCC) tapes. Also, we performed a series of time independent (steady state) simulations of the process reactor, dividing the reactor in three parts and using the results of each part as to define the boundary conditions of the subsequent part. Furthermore we explore the dependence of the machined feature size on the pressure, temperature, distance from the micro-machined silicon nozzle to the LTCC tape, and nozzle geometry. We display velocity vector as well as density gradient profiles combined with distance dependence to substantiate the argument in our narrative.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Published: April 22, 2002
Pages: 446 - 449
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-7-1