Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Characterizaton, Parameter Extraction, Calibration Chapter 8

Predictive and Calibrated Simulation of Doping Profiles: Low Energy As, B and BF2 Ion Implantation
P. Scheiblin, F. Roger, D. Poncet, C. Laviron, P. Holliger, F. Laugier, E. Guichard and J.P. Caire

Three-Dimensional Effects Obtained from Capacitance Analysis of an SRAM Cell
Y. Takemura, K. Osada, M. Yagyu, K. Yamaguchi, J. Ushio and T. Maruizumi
Hitachi Ltd., JP

Stress Measurement in MEMS Devices
L. Starman Jr., J. Busbee, J. Reber, J. Lott, W. Cowan and N. Vandelli
Wright-Patterson AFB, US

3-D Computational Modeling of RF MEMS Switches
H.D. Espinosa, M. Fischer, Y. Zhu and S. Lee
Northwestern University, US

Parameter Extraction for Surface Micromachining Using Eelectrical Characterization of Sensors
M. Maute, S. Kimmerle, J. Franz, J. Hauer, D. Schubert, H.-R. Krauss and D.P. Kern
Robert Bosch GmbH, DE

Mechanical Property Measurement of Thin-film Gold Using Thermally Actuated Bimetallic Cantilever Beams
V.K. Pamula, A. Jog and R.B. Fair
Duke University, US

Direct Write Technology as a Tool to Rapidly Prototype Patterns of Biological and Electronic Systems
B.R. Ringeisen, D.B. Chrisey, A. Piqué, D. Krizman, M. Brooks and B. Spargo
Naval Research Laboratory, US

Physical Modeling of MEMS Cantilever Beams and the Measurement of Stiction Force
T. Lam and R.B. Darling
University of Washington, US

ISBN: 0-9708275-0-4
Pages: 638