Chen J., Cheng X.L., Cai B.C., Xu D., Wang L., Cheng X.L.
Shanghai Jiao Tong University, SG
Keywords: Finite element analyses, Membrane microactuator, MEMS, micropump, Shape memory effect
A way to develop the pattern of shape memory alloys (SMA) titanium-nickel (TiNi) strips for improving the actuation performance of membrane microactuator is described in this paper. The patterned SMA strips serve not only as structural parts but also as heating resistors. Two different kinds of pattern designs are proposed and comparatively analyzed with finite element analysis (FEA) software ANSYS. Thermal-structural analysis is performed on the basis of maximum deflection potential. Coupled electro-thermal analysis is performed to investigate the effect of patterning of the SMA strips especially on the characteristics of temperature behavior. The planar pattern of the SMA strips for nonuniform heat generation rate are suggested so as homogeneous temperature variations can be obtained in the SMA thin films allowing an optimized use of the shape memory effect.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 322 - 325
Industry sector: Sensors, MEMS, Electronics
Topics: Chemical, Physical & Bio-Sensors, MEMS & NEMS Devices, Modeling & Applications
ISBN: 0-9708275-0-4