Sacks E., Barnes S.M.
Purdue University, US
Keywords: configu-ration space, MEMS, micro-mechanical design, Summit
We have developed an interactive computer-aided design program that supports the mechanical design of devices fabricated in surface micro-machining processes. The program automates kinematic analysis via a novel configuration space computation code, performs real-time simulation and kinematic tolerance analysis, and supports kinematic synthesis. Designers can visualize system function under a range of operating conditions, can find and correct design flaws, and can optimize performance. We used the program to redesign and validate a torsional ratcheting actuator fabricated at Sandia with the SUMMiT V process.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 144 - 147
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-0-4