Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

System Level Modeling Chapter 4

Squeeze Film Damping in Arbitrary Shaped Microdevices Modelled by an Accurate Mixed Level Scheme
G. Schrag, P. Voigt and G. Wachutka
Munich University of Technology, DE

Acoustic Impedance Elements Modeling Oscillating Gas Flow in Micro Channels
T. Veijola
Helsinki University of Technology, FI

Comparison of Two Novel Control Strategies for a Closed Loop Micromachined Tunnelling Accelerometer
E. Gaura and M. Kraft
Coventry University, UK

Closed Loop Micromachined Inertial Sensors with Higher Order SD-Modulators
M. Kraft, W. Redman-White and M.E. Mokhtari
University of Southampton, UK

Challenges in CMOS-MEMS Extraction
B. Baidya and T. Mukherjee
Carnegie Mellon University, US

Efficient Simulation of MEMS Using Element Stamps
G. Casinovi
Georgia Institute of Technology, US

The Coupled-Domain System Simulation/Simulatability Problem
J. Jopling, D. Rose and R.B. Fair
Duke University, US

ISBN: 0-9708275-0-4
Pages: 638