Nanotech 2001 Vol. 1
Nanotech 2001 Vol. 1
Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems

Software Tools, CAD Systems Chapter 12

A 3D Geometry Modeler for the SUMMiT V MEMS Designer

Authors: C.R. Jorgensen and V.R. Yarberry

Affilation: Sandia National Laboratories, United States

Pages: 594 - 597

Keywords: 3D Modeling, MEMS, solid modeling, SUMMiT V

This paper will describe the SUMMiT V 3D Modeler; a 3D geometric modeler based on Sandia National Laboratories new five-level process for manufacturing microelectromechanical systems (MEMS). The modeler simulates the SUMMiT V process, a baseline surface-micromachining process using low-stress polysilicon as its mechanical material. The resulting 3D model is an accurate representation of the MEMS device including artifacts like stringers and trapped oxide. The model can be used for visualization, analysis, dynamic modeling, rapid prototyping, etc. Several examples of the modeler are shown.

ISBN: 0-9708275-0-4
Pages: 638