MSM 2000
MSM 2000
Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems

Software Tools, CAD Systems Chapter 17

Finite Element Based Reduced Order Modeling of Micro Electro Mechanical Systems (MEMS)
D.F. Ostergaard and M. Gyimesi

Modeling and Simulation of 3D Structures for Gigabit DRAM
O. Kwon, S. Yoon, Y. Ban and T. Won
Inha University, KR

A New Analytical Micromotor Design Models for CAD PC-Design Tools
A. Salman, A. Napieralski and G. Jablolski
Technical University of Lodz, PL

3D MEMS Design via Matlab Interactive Plots
N.R. Lo and K.S.J. Pister
University of California, US

Wafer Fabrication Process Simulation Including Cost: Which Should be Used in an In-Line Wafer Inspection Strategy, High Sensitivity and High Cost Inspection Machine or Low Sensitivity and Low Cost Inspection Machine?
K. Nakamae, S. Yamaji and H. Fujioka
Osaka University, JP

High-Fidelity and Reduced Models of Synthetic Microjets
A.J. Przekwas, M. Turowski and Z. Chen
CFD Research Corporation, US

Quality Based Design and Design for Reliability of Micro Electro Mechanical Systems (MEMS) Using Probabilistic Methods
S. Reh, P. Lethbridge and D.F. Ostergaard

CFD-Micromesh: A Fast Geometrical Modeling and Mesh Generation Tool for 3D Microsystem Simulations
Z. Tan, M. Furmanczyk, M. Turowski and A.J. Przekwas
CFD Research Corporation, US

GEODESIC: A New and Extensible Geometry Tool and Framework with Application to MEMS
N. Wilson, K. Wang, D. Yergeau and R.W. Dutton
Stanford University, US

Numerical Simulation of Micro Assembly Techniques in MEMS Devices
N. Finch, D. Keating and Y. He
IntelliSense Corporation, US

Modified Nodal Analysis for MEMS with Multi-Energy Domains
J.V. Clark, N. Zhou and K.S.J. Pister
University of California at Berkeley, US

A Computational Framework for Modeling One-Dimensional, Sub-Grid Components and Phenomena in Multi-Dimensional Micro-Systems
M.Z. Pindera, S. Bayyuk, V. Upadhya and A.J. Przekwas
CFD Research Corporation, US

Analysis of Realistic Large MEMS Devices
P. Ljung, M. Bächtold and M. Spasojevic
Coyote Systems, Inc., US

ISBN: 0-9666135-7-0
Pages: 741